Gas pressure too low. The current program will be aborted. Please check gas !!!

What does LastPartToLess- Gas mean?

The gas pressure has dropped below a critical minimum threshold, causing the current program to abort immediately. This is a critical issue with the gas supply that requires urgent attention.

• Gas pressure dropped below the minimum requirement for the current program.
• Insufficient flow rate of the specified process gas.
• External gas supply system is failing.
• Leak in the gas path leading to the process chamber.
• Improper calibration of the gas flow controller.

Click steps to track your progress.

1. 1

   Correct the gas pressure by verifying the supply tank, regulators, and flow rates.

2. 2

   Acknowledge the message on the robot controller HMI.

3. 3

   Resume or restart the program after stable gas pressure is restored.